TRAVELLING DUCT FOR OVERHEAD TRANSPORT ROBOT OF WAFER CASSETTE,申请号JP19860277056-传众专利搜索

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发明名称	TRAVELLING DUCT FOR OVERHEAD TRANSPORT ROBOT OF WAFER CASSETTE
摘要
申请公布号	JPS63130466(A)	申请公布日期	1988.06.02
申请号	JP19860277056	申请日期	1986.11.20
申请人	SHIMIZU CONSTR CO LTD;SHINKO ELECTRIC CO LTD	发明人	IWAZAWA YOSHIYUKI;ISHIDA TSUTOMU;HARADA HIROSHI;KOBAYASHI SHINTARO;OKAMOTO KENJI;MATSUMOTO TSUYOSHI;TAKASU TOSHIO
分类号	B25J19/00;B61D27/00;F24F7/06;H01L21/677;H01L21/68	主分类号	B25J19/00
代理机构		代理人
主权项
地址

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