| 摘要 |
PURPOSE:To prevent oxidation of the edge surface of a resonator enhancing reliability by a method wherein a protective film consisting of the three thin film layers of an adhesive layer, an oxidation checking layer and a film thickness regulating layer is provided on the edge surface of the resonator. CONSTITUTION:A protective film is formed laminating on the edge surface 3 of a resonator in the order of an SiO2 film as an adhesive layer 5, an Al2O3 thin film as an oxidation checking layer 6 and a thin film of zirconium oxide ZrO2 stabilized by yttria Y2O3 as a film thickness regulating layer 7. For formation of the protective film, any method of sputtering, electron beam evaporation, etc., is favorable, while according to the sputtering method, the edge surface 3 of the resonator is made to face to a target, argon gas is ionized to generate Ar<+>, ions thereof are accelerated, and made to come into collision with the target, the target material is made to spring out, and evaporated to the edge surface of the resonator of GaAs. Adherence between the edge surface of the resonator and the protective film is firm according to the SiO2 thin film of the adhesive layer in the protective layer, and the stabilized protective film can be obtained.
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