| 摘要 |
PURPOSE:To prevent the leak of processing liquid by installing a cylinder for sealing the flowing liquid into a pressure applying chamber which is divided from a feeding chamber through a bulging type flexible film. CONSTITUTION:The edge part of a bulging type flexible film 4 is jointed with a flange 3, and a slurry feeding chamber 7 is formed from the space chamber of a casing 2. A discharge port 13 is formed inside the cylinder 9 of a casing end 8, and the flexible film 4 and the space part of the casing end 8 form a pressure applying chamber 14. Therefore, other equipment is protected when a crack is generated on the flexible film, and leak of processing liquid can be suppressed in the flowing liquid. |
