发明名称 |
Vacuum tweezers. |
摘要 |
<p>Vacuum tweezers for handling a semiconductor wafer comprises a handling section having at least one suction port opened in the same plane as the surface of the wafer and located within an area smaller than that of the surface of said wafer, a pressure reduction means connected to the suction port, a means for releasing negative pressure produced by the pressure reduction means, and a grip integrally coupled to the handling section.</p> |
申请公布号 |
EP0269097(A2) |
申请公布日期 |
1988.06.01 |
申请号 |
EP19870117420 |
申请日期 |
1987.11.25 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED |
发明人 |
NISHIGUCHI, MASANORI C/O YOKOHAMA WORKS;SEKIGUCHI, TAKESHI C/O YOKOHAMA WORKS |
分类号 |
B25B11/00;H01L21/677;H01L21/68;H01L21/683 |
主分类号 |
B25B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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