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发明名称
摘要
申请公布号	JPS4727757(U)	申请公布日期	1972.11.29
申请号	JP19710029915U	申请日期	1971.04.16
申请人		发明人
分类号	H01L21/301;B28B1/24;(IPC1-7):B28B1/24	主分类号	H01L21/301
代理机构		代理人
主权项
地址

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