| 摘要 |
PURPOSE:To remove the Barkhausen noise occurring in irregular magnetic path movement by subjecting the steps which arise from conductors for application of a biasing magnetic field and are provided to a thin insulating film formed as an underlying layer of a magnetoresistance effect element MRE of closed magnetic path structure having a slight spacing to a flattening treatment, thereby removing the steps. CONSTITUTION:The Al2O3 insulating layer 11 is first formed on a magnetic substrate 10 in such a manner that the film thickness provides a gap length. The conductor films consisting of Au, etc. of Cr base is formed thereon and then the conductors 12 for application of the biasing magnetic field is formed and the thin SiO2 insulating film 13 is formed thereon. A photoresist 15 is then spin-coated thereon to form the surface of a uniform height in order to eliminate the steps 14a, 14b arising from the conductors 12. The resist 15 and the film 13 are thereafter etched. The MRE 16 of the closed magnetic path structure having a microspacing is formed on the flattened thin film 13 and an electrode (not shown) for detecting the resistance change in the central effective part of the MRE is formed. A front yoke 18 and a back yoke 19 for guiding the signal magnetic field from a magnetic recording medium to the MRE and a thin insulating film 17 are formed and a protective layer (not shown) is formed after etching. |
