发明名称 POLISHING METHOD
摘要 PURPOSE:To aim at enhancing the dimensional accuracy and geometrical accuracy of a workpiece in a polishing method of such as a VTR head, by bonding the workpiece on an applying type stool through the intermediary of thermo- softenable adhesive and uniform shape balls or cylinders. CONSTITUTION:A thin layer of thermo-softenable adhesive 3 such as electron wax or the like is coated on an applying type stool 1, and a suitable number of spherical or cylindrical spacers 13 having a uniform size of several mum to several tenth mum and made of resin, are set thereon. Then, the workpiece 2 is stretched by being manually retained, or by, if necessary, being retained with the use of a weight 4 so as to be bonded to the stool so that the adhesive 3 layer has an uniform thickness. Therefore, polishing is made. Thus, it is possible to bond the workpiece onto the stool 1 with the dimensional accuracy of about + or -0.4 mum, and therefore, it is possible to adjust the thickness of the adhesive layer with a high degree of accuracy which is higher than that of conventional methods by one order, thereby it is possible to polish a workpiece with high dimensional accuracy and geometrical accuracy.
申请公布号 JPS63127870(A) 申请公布日期 1988.05.31
申请号 JP19860271267 申请日期 1986.11.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMASHITA MIKIO;HARA SEIICHI;MATSUNAGA HIROYUKI
分类号 B24B37/04;B24B37/30;B24B41/06 主分类号 B24B37/04
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