| 摘要 |
A silicon ampule is provided at its open end with a planar ground section, to which is pressed with the aid of a vacuum pump, a quartz tube provided with a planar ground section. Porosity caused through various thermal expansion coefficients, or thermal stresses does not occur, therefor. The silicon tube is carried only by the quartz tube and does not contact with any other material. To prevent the possible penetration of foreign substances, the planar ground section is rinsed from the outside with a protective gas. According to another embodiment, a lid provided with a planar ground section is placed upon the vertically positioned tube, after the tube was rinsed with protective gas.
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