| 摘要 |
A device or item of kiln furniture for the conveyance of silicon wafers into and out of a diffusion furnace in the manufacture of silicon diodes. The device is made essentially of high purity silicon nitride and consists of an elongated base with rotatable wheels attached thereto, and supporting means for carrying silicon wafer laden silicon nitride or silicon boats. The device, by virtue of its design and material of which it is composed, satisfies the peculiar and stringent requirements of silicon diode manufacture, by virtue of the devices ability to retain its integrity through repeated thermal shock, its chemical purity, and its non-dust generating character.
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