APPARATUS FOR PRODUCING PERPENDICULAR MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To provide a titled apparatus for production which can reduce the cost of production by providing a sputtering gun having a 1st target part consisting of Cr or Co alloy contg. Cr at a high ratio and 2nd target part consisting of a Co alloy respectively forward and backward in the traveling direction of a substrate. CONSTITUTION:The target 23 of the sputtering gun 21 is constituted of the plate-shaped 1st target part 24 which is disposed forward in the traveling direction of the film-shaped substrate and consists of the Cr or the Co alloy contg. Cr at the high ratio and the plate-shaped 2nd target part 25 which is disposed backward and consists of the CoCr alloy having the compsn. to form a recording layer. The particles from both the target parts 24 and 25 are stuck on the substrate during the travel of the substrate to form a thin metallic film. The Cr or CoCr alloy contg. Cr at the high ratio exists in the thin metallic film formed on the substrate and in the part near the subsurface thereof in the target part 23 and the target part 24. The formation of the thin CoCr alloy film having the recording layer compsn. of the low Cr concn. from the middle of the process is possible.