| 摘要 |
PURPOSE:To measure a shape with good accuracy, by performing the modulation of beam, at each of more than one scannings performed in one frame of an image pickup camera plural times, on the basis of the data preliminarily obtained by scanning a surface to be measured with irradiation beam having definite luminous intensity. CONSTITUTION:The irradiation beam 2' having definite luminous intensity emitted from a semiconductor laser beam source part 1 is allowed to be incident on the surface to be measured of a three-dimensional article to be measured to scan the same by a beam polarizer 4. The reflected beam 5 from the surface to be measured is condensed to a beam detector 6 through a lens 7 and the detected luminous intensity of the reflected beam corresponding to one scanning is sampled to be stored in the memory part of a control system 8. Next, on the basis of this data, scanning is performed plural times in one frame of an image pickup camera and the modulation of luminous intensity is performed in synchronous relation to the scanning. At this time, the bright line image 11 formed on the surface to be measured is picked up by two image pickup cameras 12, 12' to measure the position of the part of the surface to be measured of the bright line image 11 and the shape of the surface to be measured is calculated. On and after, measuring operation is repeated while the surface to be measured is moved to measure the shape thereof with good accuracy.
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