| 摘要 |
PURPOSE:To measure the propagation speed of the surface wave of a piezoelectric substrate before forming a comb tooth-shaped electrode, by arranging two kinds of surface elastic wave elements different in the distance differences between electrodes from each other on an insulating substrate generating no surface wave. CONSTITUTION:Two kinds of surface elastic wave elements each different in center-to-center distances between normal type cross digital electrode groups on an output side are constituted on an insulating substrate 11 formed of a material having no piezoelectric property and generating no surface wave such as an insulating material. That is, cross digital electrode pattern groups 12 constituting the surface elastic wave elements are arranged to one side surface 11a of the substrate 11 and needle erecting electrode pattern groups 13 are arranged to the surface 11b on the opposite side of the substrate 11. The needle erecting electrode patterns 13 and the cross digital electrode patterns groups 12 are brought to a continuity state by a through-hole technique and, by contacting the connection terminal from a frequency characteristic measuring apparatus to the needle erecting electrode patterns 13, when the substrate 11 is contacted with a substrate 14 to be measured being a piezoelectric substrate under pressure, the frequency of the corresponding surface elastic wave element can be measured.
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