| 摘要 |
To compensate for the charges created during the bombardment of a sample of insulating material, positively polarized by a beam of positive, primary ions, the method uses the secondary electrons emitted by the acceleration electrode under the impact of particles, emitted by the sample, which have not passed through the hole provided in this electrode for analysis. For this, an additional electrode, having a hole of a diameter greater than that of the acceleration electrode and carried to a potential which is greater than that of the same electrode by about 100 volts, is placed between the sample and this electrode, near the latter, to focus the secondary electrons on the imaged field of the sample.
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