| 摘要 |
PURPOSE:To simplify an optical system and to increase the number of wts., by providing a through hole permitting the passage of an optical axis to each of the wts. CONSTITUTION:A load apparatus A is equipped with a large number of wts. 15 (15a, 15b...) having various sizes and each of the wts. 15 is formed into a cylindrical shape downwardly opened and a through-hole 16 is provided to the core part thereof by drilling and all of the wts. are put one upon another in such a state that smaller wts. are successively fitted inside large wts. Further, a hollow shaft 20 is inserted through the through-hole 16. In an optical apparatus B, the hollow shaft 20 is positioned at the part directly under a half mirror 93 and the optical axis to an objective lens passes through the hollow shaft 20. The illumination light from a light source 91 passes through the mirror 93 along the optical axis L to be guided to the surface of a test piece along the optical axis M in the hollow shaft 20. The reflected light from the surface of the test piece passes through the mirror 93 from the objective lens through the optical axis M of the hollow shaft 20 to reach a prism 95 and is refracted to be guided to an eyepiece 97 along an optical axis S. By this constitution, the optical system is simplified and a number of the wts. can be increased.
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