| 摘要 |
PURPOSE:To improve the measurement accuracy of an aspherical shape by setting relatively a displacement gauge and a sample on an orthogonal coordinate system by centering and tilting, and detecting a displacement quantity of the aspherical shape of the sample. CONSTITUTION:A probe which is not shown in the figure, and a sample 2 are set relatively on an orthogonal coordinate system by centering and tilting by an adjusting mechanism of a sample holder 9. Subsequently, a displacement gauge 10 is positioned by operating a horizontal direction positioning mechanism 3, a vertical direction positioning mechanism 17, and a rotation positioning mechanism 16, by a closed control and an open control by a control means, and a displacement quantity of an aspherical shape of the sample 2 is detected. Accordingly, it is made unnecessary to correct a shape of the probe, and minute positioning is executed without a vibration, therefore, every aspherical shape is measured with high accuracy.
|
