发明名称 MANUFACTURE OF SPUTTERING TARGET
摘要 PURPOSE:To coincide the constitution of respective components with the composition of a finished target, by subjecting a green compact of target shape prepared by mixing plural kinds of powdery components and compacting the resulting powder mixture to the heat treatment at a temp. in the vicinity of the m.p. of a component having the lowest m.p. among the components and also lower than the m.p. CONSTITUTION:Plural kinds of powdery components are mixed and the resulting powder mixture is compacted into a green compact, and then above green compact is subjected to heat treatment in a temp range from (TmX0.85) to Tm deg.C, where Tm means the m.p. of a component having the lowest m.p. among the plural kinds of components. It is important that this heat treatment is carried out in an inert-gas or reduced-pressure atmosphere in order to prevent the oxidation of the material.
申请公布号 JPS63128140(A) 申请公布日期 1988.05.31
申请号 JP19860273284 申请日期 1986.11.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KODERA KOICHI;OTA TAKEO;AKIYAMA TETSUYA
分类号 C22C1/04;C23C14/34 主分类号 C22C1/04
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