发明名称 IDENTIFYING AND PROCESSING METHOD FOR CONTINUITY OF DEFECTIVE DATA ON FACE PLATE
摘要 PURPOSE:To identify the continuity of the defective data of a face plate, by repeating the attachment and registering the same registration number when a defective cell exists in a coordinate adjacent to the defective cell in succession. CONSTITUTION:A defective data in a cell unit, after the rectangular coordinate or the polar coordinate (n,m) of a cell on the face plate being added, is stored in the memory of a memory part. Firstly, the defective cell [a,b] is searched, and a searched defective cell a,b], on which the registration number is added, is registered on a continuous data table. Next, the presence/absence of the defective data for four cells: an adjacent cell [a,b+1] in a direction of (n), and adjacent cells [a+1,b-1], [a+1,b], and [a+1,b+1] in a direction (m) are checked. The cell which includes the defective data is designated as a continuous defective cell, and the same number, for example, NO.A is attached on it, then is registered on the continuous data table. Thus, it is possible to identify the continuity of the defective data of the face plate.
申请公布号 JPS63127377(A) 申请公布日期 1988.05.31
申请号 JP19860273159 申请日期 1986.11.17
申请人 HITACHI ELECTRONICS ENG CO LTD 发明人 HONDA MASASHI
分类号 H01L21/66;G01N21/88;G01N21/956;G06T1/00 主分类号 H01L21/66
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