| 摘要 |
PURPOSE:To measure a shape with good accuracy, by performing beam scanning while luminous intensity is controlled on the basis of the data preliminarily obtained by scanning a surface to be measured with irradiation beam having definite luminous intensity. CONSTITUTION:The irradiation beam 2' having definite luminous intensity emitted from a semiconductor laser beam source part 1 is allowed to be incident on the surface to be measured of a three-dimensional article 3 to be measured to scan the same by a beam polarizer 4. By this method, the reflected beam 5 from the surface to be measured is condensed to beam detectors 6, 6' through lenses 7, 7' and, from the data corresponding to one scanning, the data of a predetermined formula is guided to be stored in the memory part of a control system 8. Next, on the basis of said data, irradiation beam 2 is used to perform beam scanning while the luminous intensity thereof is modulated using the beam source part 1 and a beam attenuator 50 and attenuator parts 51, 51' are controlled in synchronous relation to said scanning. At this time, the bright line image formed on the surface to be measured is picked up by two image pickup cameras 12, 12' to measure the position of the part of the surface to be measured of the bright line image 11 and the shape of the surface to be measured is calculated. On and after, measuring operation is repeated while the surface to be measured is moved and the shape thereof is measured with good accuracy.
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