| 摘要 |
PURPOSE:To form not only void holes in a desired pattern but also a highly precise pattern at low cost and good yield, by forming the pattern on a glass plate from an org. photosensitive resin and further coating said pattern with a silica sol before applying heat treatment. CONSTITUTION:An org. photosensitive resin 2 is etched by a photolithographic technique to form a desired pattern on a glass plate 1 and a silica sol 3 is subsequently applied to the glass plate 1 having the pattern formed thereto and dried. The glass plate after coating is heat-treated to decompose the org. photosensitive resin 2 and nozzle like void holes 2' for an ink jet printing head are formed. Since the org. photosensitive resin 2 subjected to patterning is present between the glass plate 1 and the silica coating film 3, said resin 2 is decomposed by high temp. heat-treatment and the decomposed parts become the void holes 2'. Therefore, when a desired pattern is applied to the org. photosensitive resin 2, the void holes 2' can be formed in the desired pattern by the decomposition of said resin due to heat treatment. |
