| 摘要 |
PURPOSE:To increase the numbers of elements to be processed without elongating processing chamber by a method wherein multiple holding jigs array-holding the multiple elements to be processed are arranged inside a processing chamber in the radial direction to rotate said elements. CONSTITUTION:A processing chamber 2 made of quartz tube is inserted into a cylindrical heating body 1 with an axis in the vertical direction to heat the inside of processing chamber 2 at specified temperature. The cap 8 of an exhaust chamber 7 connected to the lower end part of processing chamber 2 are vertically arranged with multiple holding jigs 9 around the central axle. Multiple semiconductor wafers 10 are held by the jigs 9 in the axial direction at specified intervals. Thus, the rotating jigs 9 are revolved around a driving gear 12 by the gear 12, an inner gear 13 and a driven gear 14 to be driven by a motor 11. In such a constitution, the semiconductor wafers 10 are surface- processed in even contact with the gas fed from gas nozzles 4, 5 by the rotation of jigs 9.
|
