发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 PURPOSE:To perform writing by a low voltage, by making the band width of an insulating film interposed between a first electrode to inject electrons and a second electrode into which electrons are injected wide and narrow, on the first electrode side and on the second electrode side, respectively. CONSTITUTION:The band width of a writing gate insulating film 4 between a writing gate electrode 3 injecting electrons at the time of writing information and a storage gate electrode 7 into which electrons are injected is made wide and narrow, on the writing gate electrode 3 side and on the storage gate electrode 7 side, respectively. Therefor, electron is easily injected form the writing gate electrode 3 to the storage gate electrode 7, and electron is difficult to be injected in the inverse direction. Similarly, the band width of an erasing gate insulating film 6 between the storage gate electrode 7 injecting electrons at the time of erasing information and an erasing gate electrode 5 into which electrons are injected is also made wide and narrow, on the storage gate electrode 7 side and on the erasing gate electrode 5 side, respectively.
申请公布号 JPS63126278(A) 申请公布日期 1988.05.30
申请号 JP19860271695 申请日期 1986.11.17
申请人 HITACHI LTD 发明人 WADA YASUO
分类号 H01L21/8247;H01L21/8246;H01L27/10;H01L27/112;H01L29/78;H01L29/788;H01L29/792 主分类号 H01L21/8247
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