| 摘要 |
PURPOSE:To prevent the foreign matters of roll brushes from resticking to the succeeding elements to be cleaned up by a method wherein the roll brushes held by rotatable belts are cleaned up at the separating positions from any already cleaned up elements. CONSTITUTION:The roll brush groups 3a, 3b comprising upper and lower two systems are composed of selfrotatable roll brushes 3 held by rotatable belts 6. When a reticle 2 to be cleaned up is held between both roll brush groups 3a and 3b, the roll brushes 3 formed of porous sponge are rotated oozing out cleanser to remove any foreign matters on the surface of reticle 2. After cleaning the reticle 2 by specified times of rotations, the belts 6 are rotated by one more pitch to shift the roll brushes 3. Through these procedures, the rotated roll brushes 3 reaching the opposite side to the reticle 2 are fed with fresh water to clean up the reticle 2. |
