| 摘要 |
PURPOSE:To perform slow air supply for a comparatively short time and also to improve operation efficiency by furthermore introducing clean gas into a vacuum equipment while performing slow air supply and also exhausting from the vacuum equipment. CONSTITUTION:In case of using slow air supply and ordinary air supply in order to solve vacuum pressure and also performing slow air supply, furthermore clean air is introduced into a vacuum equipment and simultaneously gas having same amount as it or amount less than it is exhausted. The exhaust in case of the slow air supply is performed before the dust in the vacuum equipment is flown and settled down by both slow air supply and introduction of clean gas. Therefore the exhaust is performed at the same time as the introduction of clean gas or after it. By this exhaust, flown dust is removed from the equipment. As an exhauster, a vacuum pump used for exhausting the vacuum vessel is preferably used. |
