| 摘要 |
PURPOSE:To improve the rate of synthetic reaction of diamond or diamond-like carbon film from a hydrocarbon and hydrogen using a chemical vapor deposition process, by using a hydrocarbon having cyano group as the raw material. CONSTITUTION:A substrate made of e.g. silicon is placed in a reaction tube and electromagnetic wave generated by a microwave oscillator is introduced into the reaction tube via a waveguide. At the same time, hydrogen and a hydrocarbon having cyano group are introduced from the top of the reaction tube and made to react with each other to produce diamond and a diamond-like carbon film on the substrate. The hydrocarbon having cyano group is e.e. cyanoacetylene, acrylonitrile, methacrylonitrile, etc. The activation of the raw material may be carried out by a hot filament, thermal energy of e.g. laser, etc., in addition to the above plasma activation method.
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