SYNTHESIS OF DIAMOND BY VAPOR-PHASE PROCESS

摘要

PURPOSE:To increase the deposition rate of diamond and to enlarge the deposition area in a vapor-phase synthesis of diamond from a carbon source compound and a hydrogen source compound, by exciting the hydrogen source compound with a Wood's discharge tube. CONSTITUTION:A Wood's discharge tube 25 is inserted into an upper part of a reaction chamber 21 and a substrate-supporting table 24 is rotatably placed in the reaction chamber 21. A substrate 29 such as silicon is placed on the substrate-supporting table 24 and heated with a substrate heater 23. A hydrogen source compound (e.g. hydrogen gas) is excited by the Wood's discharge tube 25 and introduced into the reaction chamber 21. A carbon source compound (e.g. acetone) is introduced into the reaction chamber 21 through a feeding tube 26 and a heating filament 26 is heated with a power source 27 to generate electron rays. The carbon source compound is excited by the electron ray to effect the synthesis of diamond and deposit diamond on the substrate 29.