发明名称 COLOR FILTER AND ITS PRODUCTION
摘要 <p>PURPOSE:To permit formation of fine patterns with a simple process for production by forming a resist layer which has the sensitivity higher than the sensitivity of a colored resin and does not dissolve in a developing soln. for the colored resin on a colored resin layer which is formed to a pattern shape. CONSTITUTION:The colored resin film 2 is coated to a required film thickness on a substrate 1 by using a polyamide resin soln. contg. a prescribed ratio of a coloring material having desired spectral characteristics and is baked. The similar polyamide resin soln. is then coated on the film 2 and is baked to form a transparent resist film 7. The film 7 is exposed through a photomask 3 having a prescribed pattern shape at a required exposure by light (high- pressure mercury lamp, etc.) having the sensitivity of the resist film to photoset 7a the pattern part. The film 7 is then ultrasonically developed by a solvent which dissolves only the unexposed part and colored resin to form the pattern leaving only the resist pattern film and the resin film 2 thereunder. The photosetting of the patterned part of the colored resin is then executed by full surface exposing and the resin layer is baked by which the patterned colored resin layer 4 having the resist layer 7b thereon is obtd.</p>
申请公布号 JPS63124002(A) 申请公布日期 1988.05.27
申请号 JP19860271260 申请日期 1986.11.13
申请人 CANON INC 发明人 TAKAO HIDEAKI;TAMURA MIKI;KAMIO MASARU;MURATA TATSUO;SEKIMURA NOBUYUKI;TAKAHASHI TORU
分类号 H01L27/14;G02B5/20;G02F1/133;G02F1/1335;H04N9/07 主分类号 H01L27/14
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