| 摘要 |
PURPOSE:To make the washing in a reaction chamber rapid by providing a movable reflecting mirror for irradiating and washing the inner wall surface of the reaction chamber by reflecting ultraviolet light into the reaction chamber. CONSTITUTION:Ultraviolet rays emitted from a light source 4 pass through an ultraviolet rays transmitting plate 5 and enter in a semi-spherical reflecting mirror 8 moved to the position of a substrate via a driving unit 11 and an arm 9. The reflected light irradiates the inner wall of a reaction chamber 1, separates molecules adsorbed in the inner wall, which are discharged by an exhaust unit 6 to make the inner wall clean. Then, after the arm 9 is turned by the driving unit 11 and a sucker 10 is positioned at the top of the reflecting mirror 8, the mirror 8 is attracted by lowering the arm 9. Then, the arm 9 is raised and turned to the opposite direction. The mirror 8 is separated from the sucker 10 by sending air to the sucker 10.
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