发明名称 STAMPER FOR OPTICAL RECORDING MEDIUM AND ITS MANUFACTURE
摘要 PURPOSE:To obtain a stamper per optical recording medium which can form a molding without the eccentricity of a surface blur and with precise measurement by forming an optical guide groove and an address pit in the layer of a photoresist applied to the substrate by means of exposure and development with laser beams and bake processing it with a prescribed temperature. CONSTITUTION:The photoresist 2' is applied to the substrate 4 having a shape which is adjusted to a molding machine. The photoresist is exposed and developed by the laser beams, and the address pit and the optical guide groove are formed in the photoresist. With baking it at a temperature over 160 deg.C, the photoresist layer 2' turns into a rigid film, and a stamper which can be proof against the heat and pressure of resin injection molding is formed. The photoresist 2' has a characteristic changing to a rigid film which does not change even if it is put into alkaline peeling liquid for a long time with baking it at temperature over 160 deg.C, and about 30-120min is adequate for the baking time. The molding with considerably improved flatness can be obtained, and the stamper can be obtained by an extremely shortened procedure.
申请公布号 JPS63124243(A) 申请公布日期 1988.05.27
申请号 JP19860268611 申请日期 1986.11.13
申请人 CANON INC 发明人 KOMATA HIROSHI
分类号 G11B7/26;G11B7/24 主分类号 G11B7/26
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