摘要 |
PURPOSE:To obtain a stamper per optical recording medium which can form a molding without the eccentricity of a surface blur and with precise measurement by forming an optical guide groove and an address pit in the layer of a photoresist applied to the substrate by means of exposure and development with laser beams and bake processing it with a prescribed temperature. CONSTITUTION:The photoresist 2' is applied to the substrate 4 having a shape which is adjusted to a molding machine. The photoresist is exposed and developed by the laser beams, and the address pit and the optical guide groove are formed in the photoresist. With baking it at a temperature over 160 deg.C, the photoresist layer 2' turns into a rigid film, and a stamper which can be proof against the heat and pressure of resin injection molding is formed. The photoresist 2' has a characteristic changing to a rigid film which does not change even if it is put into alkaline peeling liquid for a long time with baking it at temperature over 160 deg.C, and about 30-120min is adequate for the baking time. The molding with considerably improved flatness can be obtained, and the stamper can be obtained by an extremely shortened procedure.
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