| 摘要 |
PURPOSE:To provide precise location with no backlash by pinching a fine movement mechanism consisting of a hollow structure, which makes minute deformation with fluid pressure, between machine tool structures. CONSTITUTION:A fine movement mechanism A is pinched between machine tool structures 1, 1'. This fine movement mechanism A includes of a hollow structure 2 consisting of a bottomed cylinder, a sealing lid 3 for said hollow structure 2, and a pressure fluid source to send pressure fluid into the hollow structure 2 through a servo valve 5. The hollow structure 2 has flanges 2a, 2b in parallel up and down, which are pinched which contacting the abovementioned machine tool structure 1, 1'. In the hollow structure 2, an elongation delta1 in the direction toward the bottom and a contraction delta2 in the perpendicular direction due to elongation of the sides are generated by supplying fluid pressure under control to the space made liquid-tight by the hollow structure 2 and sealing lid 3 by the use of serve valve 5. |
