| 摘要 |
PURPOSE:To produce uniform and high-purity powder of metallic compd. by introducing metallic vapor into a reaction chamber without largely lowering the temp. thereof and introducing reaction gas contg. other element into the reaction chamber and allowing metallic vapor to react with the reaction gas. CONSTITUTION:Jets 72 jetted through a nozzle 48 are led to the space in a cylindrical body 114 and introduced into the space between cylindrical bodies 114, 116 via the ventilation pipes 128, and furthermore introduced into the space between cylindrical bodies 116, 118 via the ventilation pipes 128. In this case, fine powder of metallic compd. is stuck on the inner circumferential surfaces of respective cylindrical bodies, and the fine powder is scraped down with brushes 130-134 and falls to a powder collection funnel 154 via holes 138 and is collected in a conduit part 154a. Then the fine powder in the conduit part 154a is transferred to a hopper 160 by opening an on-off valve 162 and working an exhaust pump 166. |
