| 摘要 |
PURPOSE:To enable the measuring of an exact beam density distribution, by scanning the cross-section of a charged particle beam turning a probe comprising a conductor connected to a current measuring means to measure a current value generated. CONSTITUTION:A probe composed of a conductor 1 connected to an ammeter 5 and an insulating body 2 is positioned outside a charged particle beam 3. The insulating body 2 is held with a rotary scanning mechanism 7 to allow the moving of the probe on an orbit depicting a circle and to the center of the circle. The ammeter 5 is connected to a computer 6. The probe is set at a specified position and starts to measure by moving on an orbit 4 with the initialization of the ammeter 5. The probe moves inward by the size of the conductor 1 as it makes each rotation on the orbit 4, the operation which is performed until the probe comes to the cross-section center of the beam 3. A current value generated by a charge effect of the beam 3 according to the movement of the probe is stored into the computer 6 at each point of the movement. After the movement thereof, the memory data is processed and displayed as beam density distribution of the beam 3.
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