| 摘要 |
PURPOSE:To grow a crystal having the microscopic structure of a superlattice and the like into an excellent controllability by a method wherein a shutter is formed in a conical shape, and the title device is constructed in such a manner that the vertex of the device is arranged in the direction of a crucible. CONSTITUTION:A shutter 4a is formed into a conical shape, and it is arranged in such a manner this its vertex is directed toward a crucible. A part of the heat radiation emitted from the crucible and the surface of a molecular beam material comes out to outside the crucible without interruption by the shutter 4a. Also, a part of the heat radiation made incident on the shutter is reflected in the angle equal to the angle of incidence, but as the shutter 4a is formed into a conical shape having the vertical angle of 90 deg., all the heat radiation is reflected in the direction outside the crucible 1. Accordingly, the rate of the heat radiation reflected by the shutter 4a and returned to the crucible can be made smaller than that of the previous examples, and the difference in the surface temperature of a molecular beam material 3 when the shutter 4a is closed and when it is opened can be reduced.
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