发明名称 METHOD FOR MEASURING SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To improve the heat dissipation of a measuring head by a method wherein fans having a conical rotating shaft, on which rotor blades are fixed, are provided on the mutually opposing end surfaces of the measuring head of a structure, wherein a circuit is arranged in a hollow container of a section roughly being constituted of a rectangular parallelepiped. CONSTITUTION:A rotating shaft 3 is formed into a conical form, a plurality of rotor blades 4 are mounted on this rotating shaft and moreover, a load from a power source is introduced through a conductor 5 which is coupled with the rotating shaft. Fans 2... having this singular rotating shaft 3 surely hold a constant form no matter what the positions may be, that is, their terminals and points respectively come to be positioned downward and upward because their points 6 are lighter than their terminals 7 in weight and even though a measuring head 1 mounted with these fans is moved to (a), (b) and (c), the fans 2 and 2 mounted downward carry out a function to discharge the air at the position (a) and contrary to this, the fans 2 and 2 which are provided upward show an operation to intake the air. Even though the measuring head is shifted to the (b) and (c), the operation of these fans 2 and 2 becomes constant. Accordingly, the heat generated in the measuring head 1 flows in the directions of arrows shown in the first diagrams a-c and is efficiently dissipated.
申请公布号 JPS63122228(A) 申请公布日期 1988.05.26
申请号 JP19860267811 申请日期 1986.11.12
申请人 TOSHIBA CORP 发明人 HAYASHIDA KATSUMI
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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