| 摘要 |
PURPOSE:To enhance reliability by reducing the change in resistance with the elapse of time and preventing the release of an electrode layer, by forming a heat generating resistor layer of a thin membrane oxide containing ruthenium oxide as the first main component and constituting a part of the electrode layer on said resistor layer of an alloy layer based on Ni. CONSTITUTION:A glaze layer 11 is formed on a substrate 10 composed of ceramic such as Al2O3 and, after washing, a heat generating resistor layer 12 composed of a RuO2 membrane resistor is formed on said glaze layer 11. An electrode layer 15 having a two-layered structure composed of a lead electrode 13 and a lead layer 14 composed of Au is laminated to said heat generating resistor layer 12 and an abrasion resistant layer 16 is formed on said electrode layer 15. These layers are formed by a method wherein MRuO3 (wherein M is Ca, Sr or Ba) is used as a target to be applied to the alumina substrate 10 having the glaze layer 11 formed thereto at first in a film form by RF sputtering ana Ni, Fe and Au are subsequently formed in succession by a vapor deposition method and, thereafter, the resistor is subjected to patterning and Al2O3 is further applied by RF sputtering to form the abrasion resistant layer 16. |
