| 摘要 |
PURPOSE:To prevent a sheet-like object to be transferred from being damaged and from being contaminated by a foreign substance and to transfer the object simply and efficiently by a method wherein the sheet-like object contained in a first jig for accommodating more than one parallel-arranged sheet-like object is pushed and is shifted along a guide groove and a second jig is installed in such a way that this jig transfers the sheet-like object between carriers by keeping the state prescribed by the guide groove. CONSTITUTION:A carrier jig 1 where a wafer 24 can be inserted into each holding groove 6 is positioned by a stopper part 9; a carrier 11 is raised; the wafer 24 is pushed along the holding groove 6 and is transferred to a lower parallel part 13a of a guide groove 13. Then, if a first carrier 14 is raised by means of a feedscrew device 15, the wafer 24 is transferred onto the first carrier 14; then, a second carrier 16 is inserted just under the wafer 24. In succession, if the second carrier 16 is raised, the wafer 24 is transferred onto the second carrier 16. Because, during this process, the interval between upper parallel parts 13b of the guide groove 13 coincides with the interval between holding grooves 19 of the second carrier 16, the wafer 24 is inserted into each holding groove 19. Then, a heat-treatment jig 20 is inserted between both side- walls 12, 12 of a main body 7 and is raised at the sane time; the wafer 24 mounted on the second carrier 16 is picked up by the heat-treatment jig 20.
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