发明名称 PELLET BONDING APPARATUS
摘要 PURPOSE:To improve the reliability of a pellet bonding apparatus and reduce rejection rate by using a recognition device mounted in the apparatus, and automatically measuring the coating state of adhesive before bonding the pellet. CONSTITUTION:A package 10 is coated with an adhesive used for bonding by a paste bonding unit 3. After the adhesive is applied, the image of a cavity 12 is photographed by an inspecting TV camera 5, its image information is stored in an image memory in a recognition device 9, and binarized by a suitable threshold value. Then, binary image is segmented to calculated the profile information and centroid of paste 15. The propriety of coating amount is discriminated on the basis of the information. The result is fed back to a paste potting controller to correct the coating amount (discharging amount), thereby preventing a defect due to improper adhesive coating amount from occurring.
申请公布号 JPS63122129(A) 申请公布日期 1988.05.26
申请号 JP19860267593 申请日期 1986.11.12
申请人 HITACHI LTD 发明人 OKABE TAKASHI;ARIGA MAKOTO
分类号 H01L21/52 主分类号 H01L21/52
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