| 摘要 |
PURPOSE:To obtain a compact gas laser system by arranging electricity-discharging parts in a cross-shaped manner and by constructing an optical resonator where these electricity-discharging parts are connected to be 4-shaped, and to obtain a laser beam of good quality by selecting the flowing direction of a gas. CONSTITUTION:The respective voltage is applied to each of four sets of electrodes 11a, 11b, 12a, 12b, 13a, 13b, 14a, 14b which are arranged in a cross-shaped manner; electricity is discharged; CO2 is excited; a laser beam 10 is excited by an optical resonator which is constructed by connecting electricity-discharging parts 21, 22, 23, 24 to be 4-shaped by means of four reflecting mirrors 9, 82 and 81, 83 which sandwich the electricity-discharging parts 21, 23 and 22, 24 which are situated face to face with each other with reference to a cross-shaped intersecting part 0. A gas duct is installed in such a way that a laser gas flows into an electricity-discharging part from spaces A, C which are situated face to face with each other with reference to the cross-shaped intersecting point 0 out of four spaces A, B, C, D which are split by the electricity- discharging parts 21, 22, 23 24 and flows out toward the remaining two spaces B, D. This flowing direction of the gas is a structure where the distribution of a gas temperature for the laser beam is cancelled and the laser beam of good quality is obtained. |
