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发明名称
摘要
申请公布号
JPS6379638(U)
申请公布日期
1988.05.26
申请号
JP19860175071U
申请日期
1986.11.13
申请人
发明人
分类号
H01L21/304;B08B3/02;(IPC1-7):H01L21/304
主分类号
H01L21/304
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