| 摘要 |
PURPOSE:To improve running durability and corrosion resistance by projecting the ionized active particles or hydrogen atom ions or hydrogen molecule ions of an org. compd. simultaneously at the time of forming a plasma-polymerized protective film layer consisting of the org. compd. on the surface of a thin ferromagnetic metallic film layer. CONSTITUTION:A polyester film 1 on which the thin ferromagnetic metallic film layer 12 is formed is moved from a stock roll 2 along the peripheral side face of a cylindrical can roll 3. Gaseous monomer of tetrafluoroethylene is introduced from a gas introducing pipe 6 mounted to a treatment vessel 5 into said vessel and a high frequency is impressed thereto by an electrode 7 to effect plasma polymn. The gaseous methane is simultaneously introduced through a gas introducing port 9 into a Kaufmann type ion gun 8 to ionize the monomer gas and to project the ionized active particles to the region of the film 1 where the plasma polymn. progresses. The plasma-polymerized protective film layer 13 is thus formed. The crosslinking degree of the plasma-polymerized protective film is thereby increased and the durability and corrosion resistance of the film are improved to a greater extent.
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