| 摘要 |
<p>PURPOSE:To reduce the number of stage of a process for producing an electrode substrate, to reduce the cost, and to improve the yield by achieving the formation of an insulating layer of a MIM element and the formation of a condenser on a picture element electrode simultaneously in a process for producing an electrode substrate for a liquid crystal display element having a condenser built therein in series with the MIM element. CONSTITUTION:Film of a metal such as Cr, Al, Ta, etc. is formed by sputtering or vapor deposition on an insulative substrate 11, forming a lower metallic electrode 21 by patterning, and patterning transparent electroconductive film such as of SnO2, etc. after sputtering or vapor deposition, thus a transparent picture element electrode 31 is formed so as to connect the lower metallic electrode 21 electrically at the end part. Then, insulative layers 23, 33 are formed in a noncontacting manner with each other on the lower metallic electrode 21 and the transparent picture element electrode 31 by combining the procedure for forming film and patterning. The insulative layer 23 functions as an insulating part. On the other hand, the insulative layer 33 functions as a condenser. Further, an upper metallic electrode 25 is formed above the insulative layer 23. By this constitution, the connection of the condenser is enabled with a small number of stage for production.</p> |
