| 摘要 |
PURPOSE:To improve the accuracy and reproducibility of a measured temperature by heating a guiding part for inputting infrared rays from an infrared ray detector by a prescribed heating means. CONSTITUTION:A quartz-made glass fiber 6 is inserted into a film forming chamber 1, its light guiding end face 6a is arranged near a base 3 and the other end is connected to the infrared ray detector 4. A winding heater 7 for executing heating based upon electric resistance is fitted to the tip part of the end face 6a. In case of forming a film on the base 3, current is supplied to the heater 7 at first to evaporate dirt adhering to the end face 6a and then the current supply is interrupted. After heating the base 3, current is supplied to the heater 7 again and temperature is measured with the output of a photodetector 4. Since the end face 6a is cleaned, the intensity of infrared rays is not reduced, the temperature of the base 3 can be highly accurately measured and the reproducibility can be improved.
|
