| 摘要 |
PURPOSE:To reduce the size of a shutter and vacuum vessel by disposing a shutter having the surfaces respectively directed to plural ion sources which are directed from the directions different from each other toward a substrate holder. CONSTITUTION:The holder 3 which is constituted oscillatably in an arrow direction and turnable in an arrow B direction by a holder driving device 9 is installed in the vacuum vessel 1 to hold a substrate 2. Ion beams 41, 51 of respectively high and low energies are projected from the plural ion sources 4, 5 toward the holder 3 from the different directions. Materials 61, 71 to be evaporated are simultaneously evaporated from >=1 units of evaporation sources 6, 7. One unit of the shutter 8 which has the surfaces respectively directed to the ion sources 4, 5 and intermits the ion beams 41, 51 and materials 61, 71 entering the substrate 2 is disposed to the above-mention film forming device which forms the film on the surface of the substrate 2 in the above-mentioned manner.
|
