| 摘要 |
PURPOSE:To form an upper core without generating meandering or irregularity, and to obtain satisfactory film thickness especially in a step part, by forming a recessed part in advance on the upper core, and arranging a laminated coil conductive layer at a position where the recessed part is formed. CONSTITUTION:A photoresist is coated on a magnetic material 10 having high permeability, and the material is formed in a shape to form the upper core by etching, and low-m.p. junction sealing glass 13 having a coefficient of adaptive thermal expansion is used as a junction material to join the magnetic material 10 with high permeability and a protecting material 12. The photoresist is coated on the plane of the upper core 11, and a recessed groove 14 is formed by ion beam etching, etc., and next, coil junction sealing glass 13' is formed, and after forming it, a required part is left by grinding. In such a way, the upper core 11 having a prescribed shape is formed in a flat shape without having the irregularity, and satisfactory thickness can be obtained in the step part in an obtained upper magnetic layer.
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