发明名称 Atomic jet radiation source
摘要 A compact radiation source is obtainable by cascade ionization of a high pressure gas jet as it emerges into a vacuum. The high frequency electric field causing the ionization can be supplied by either microwave or infra-red means. The radiation produced includes ions, atoms, plasma or light, in particular, vacuum ultraviolet radiation.
申请公布号 US4746799(A) 申请公布日期 1988.05.24
申请号 US19860890556 申请日期 1986.07.30
申请人 MCMILLAN, MICHAEL R. 发明人 MCMILLAN, MICHAEL R.
分类号 G03F7/20;H01J27/16;(IPC1-7):H01J27/02 主分类号 G03F7/20
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