发明名称 Field effect transistor
摘要 This invention relates to the structure of a field effect transistor, which is suitable for liquid crystal display of an active matrix scheme and there is disclosed a new structure for the field effect transistor, in which at least one of the source region and the drain region is of multi-layered structure, in which high impurity concentration portions and low impurity concentration portions are alternately superposed on each other.
申请公布号 US4746961(A) 申请公布日期 1988.05.24
申请号 US19870059785 申请日期 1987.06.08
申请人 HITACHI, LTD. 发明人 KONISHI, NOBUTAKE;MIYATA, KENJI;HOSOKAWA, YOSHIKAZU;SUZUKI, TAKAYA;MIMURA, AKIO
分类号 H01L27/12;G02F1/1368;H01L29/08;H01L29/78;H01L29/786;(IPC1-7):H01L29/78;H01L29/12;H01L29/161 主分类号 H01L27/12
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