摘要 |
PURPOSE:To obtain an optional displacement by energizing a piezo-electric element with a servo system and allowing a control circuit to control clamp means with the predetermined timing synchronous with the switching timing of the reference voltage. CONSTITUTION:Iron pieces 15, 16 are connected to both sliders 1, 2 via plate springs 17, 18 respectively. Electromagnets 9, 10 are arranged to face these iron pieces 15, 16 in their movement ranges. The electromagnets 9, 10 absorb the iron pieces 15, 16 when energized and clamp both sliders 1, 2 respectively. Energization of both electromagnets 9, 10 is performed by a power supply 8 via the contact points of relays 19, 20, and the relays 19, 20 are controlled by a control circuit 6 via the voltage V1, V2. The control circuit 6 outputs the voltage V1, V2 with the predetermined timing and in addition outputs the reference voltage e1 and e2 in turn with the predetermined timing, which is inputted to the plus terminal of an adder 5.
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