| 摘要 |
PURPOSE:To simultaneously form a spacer and a diaphragm, to easily alter pressure sensitivity and to eliminate the necessity for preliminarily providing an upper displaceable electrode to the diaphragm, by stacking a metal cover film on a membrane and the substrate in the periphery thereof. CONSTITUTION:A lower fixed electrode 2 is formed to a substrate 1 composed of a glass substrate and an insulating film 3 is formed thereon. Next, a membrane 4 removed after a space and a diaphragm are formed to form a cavity chamber 7 is provided on said film 3 and, thereafter, the spacer, the diaphragm and a metal film 5' becoming an upper displaceable electrode are simultaneously formed on the membrane 4 and the peripheral substrate thereof by metal vapor deposition or electroless plating. Thereafter, a through-hole 6 is opened in the substrate 1 by etching and the membrane is removed by heating or etching to provide the cavity chamber 7. The pressure sensor thus obtained can be controlled to an arbitrary pressure sensitivity by adjusting the thickness of the diaphragm.
|
