X-ray detector efficiency standard for electron microscopes

摘要

An X-ray detector efficiency standard is formed of multiple spherical particles of various materials distributed over the surface of a substrate. The particles are preferably formed of pure materials, such as pure elements and stoichiometric compounds, having characteristic X-ray emission energies which span a range sufficient to determine the efficiency of the X-ray detector substantially over its operating range. The spherical particles may be formed by an electrohydrodynamic spraying process and have a diameter preferably in the range of 10 nanometers to 1 micron.