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发明名称
MIS GATAHANDOTAISHUSEKIKAIRONO SEIZOHOHO
摘要
申请公布号
JPS5136883(A)
申请公布日期
1976.03.27
申请号
JP19740110294
申请日期
1974.09.25
申请人
NIPPON ELECTRIC CO
发明人
ICHIDA KENJI
分类号
H01L21/336;H01L21/265;H01L21/76;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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