| 摘要 |
PURPOSE:To run stably a vapor deposited tape and to improve wear resistance by forming turngsten carbide by reactive vapor deposition, etc., on a machined aluminum alloy. CONSTITUTION:A guide post of which the surface roughness is finished by machining is put into a vacuum treating vessel after defatting and cleaning and while the inside of the vessel is controlled to a prescribed temp., tungsten W is heated to evaporate by an electron beam. Gaseous CH4 is introduced therein to generate plasma and to form tungsten carbide WC so that the tungsten carbide is deposited and coated on the surface of the guide post. The guide post is taken out into the atmosphere after cooling. WC is thus coated by the reactive vapor deposition on the part of the guide post where a tape travels, the running property of the vapor deposited tape is improved and the life is extended. |
